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150-mm Process Summary
| |
Units |
TQTRx |
TQHiP |
TQHBT3 |
TQPED |
TQRLC |
| Release Status |
|
Production |
Production |
Production |
Production |
Production |
| Transistor Type |
|
1 E-Mode 1 D-Mode |
1 D-Mode |
1 BiP |
1 E-Mode 2 D-Mode |
(None) |
| E-FET Vth |
V (E) |
+0.15 |
|
|
+0.35 |
N/A |
| D-FET Vp |
V (D, D2) |
-0.6,-2.2 |
-2.2 |
|
-0.8 |
N/A |
| HBT Vbe |
|
|
|
+1.15 |
|
|
| Gate Length |
µm |
0.6 |
0.5 |
|
0.5 |
N/A |
| HBT Emitter |
µm |
|
|
3 x 30 |
|
N/A |
| Drain Current, sat |
mA/mm (E,D,D2) |
80,70,270 (365 Imax) |
250 (335 Imax) |
N/A |
225 (310 Imax) |
N/A |
| Ft |
GHz |
20 |
16.5 (50% Idss) |
40 |
25,30 |
N/A |
| Gm or Beta |
mS/mm (E,D,D2) |
225,200,270 |
140 |
130 |
350,625 |
N/A |
| Nom. Breakdown |
V |
12,12,15 (E,D,D2) |
18 (14 min) |
24,7,14 (cbo,beo,ceo) |
15,15 (E,D) |
N/A |
| Interconnect |
Total Layers |
3 |
3 |
3 |
3 |
4 |
| MIM Caps |
pf/mm2 |
1200 |
600 |
1200,600 |
600 |
600 |
| NiCr Resistors |
Ohms/sq |
50 |
50 |
50 |
50 |
50 |
| Bulk Resistors |
Ohms/sq |
600 |
600 |
350 |
285 |
(None) |
|
100-mm Process Summary
| |
Units |
.5-µm HFET |
| Size |
µm, # fingers |
300, 4 |
| VDD/IDS |
V, mA |
8, 22.5 |
| Freq |
GHz |
2 |
10 |
18 |
| NF Min |
dB |
0.8 |
2.2 |
3.3 |
| MSG, MAG |
dB |
20.8 |
13.8 |
10.4 |
| PAE % |
|
>70 |
65 |
50 |
| POUT |
W/mm |
0.60 |
| Ft |
GHz |
19C |
| fMAX |
GHz |
57D |
| IDSS |
mA/mm |
245 |
| Gm |
mS/mm |
165 |
| VBD |
V |
-22 |
| VP |
V |
-1.8 |
|
| |
Units |
.25-µm MMW pHEMT |
| Size |
µm, # fingers |
400, 8 |
600, 10 |
| VDD/IDS |
V, mA |
2, 20 |
6, 90 |
| Freq |
GHz |
10 |
18 |
26 |
10 |
18 |
26 |
| NF Min |
dB |
0.6 |
1.1 |
1.6 |
|
| MSG, MAG |
dB |
14.9 |
12.6 |
11.4 |
17.5 |
15.4 |
11.3 |
| PAE % |
|
60 |
50 |
40 |
65 |
55 |
45 |
| POUT |
W/mm |
0.10 |
0.60 |
| Ft |
GHz |
55 |
55 |
| fMAX |
GHz |
75D |
75D |
| IDSS |
mA/mm |
285 |
285 |
| Gm |
mS/mm |
375B |
375B |
| VBD |
V |
-21 |
-21 |
| VP |
V |
-1 |
-1 |
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